SPEA RTA Series is a family of multi-axis positioners for testing MEMS accelerometers and gyroscopes. They allow the multi-site test of 32 devices simultaneously, while providing precise and reliable angular position, rate and acceleration motion. Constant velocity is applied for accelerometers, while sinusoidal angular rate input is provided for gyro test. The axes are driven by torque motors, which ensure enhanced position and velocity accuracy.
The system interface, with up to 600 wires, links the output pin devices directly to the measurement unit, so to perform all the parametric measurements during the MEMS stimulation.
The Rate Tables are easy to operate: it is very simple to set instruction sequences, use direct move commands, start the electrical measurements of the device.
They can either be embedded in integrated MEMS test cells (complete of test handler and testing unit), or used as engineering units, connected to the test system (Comptest MX series), in order to perform mass production as well as engineering and prototype test.