Single-vendor test cells that integrate test and handling, with true test capability of 32 devices in parallel, are an answer to the relentless pressure to drastically reduce the cost of the wafer- and final- test of MEMS, while addressing the increasing test requirements.

The complete integration between Comptest MX Series modular test equipment and H3500 Series handler provides a turn-key solution in a minimized footprint, while taking advantage of a unique software environment and an optimized communication between the systems. Specific MEMS stimulus units are added to the handler to meet specific sensor device requirements: MEMS gyroscopes, 3-axial accelerometers, microphones, pressure sensors, magnetic sensors, etc. 

This holistic high productivity driven test solution results from the cooperation with leading semiconductor device makers. Each component has been designed to work optimally with the other components, contributing to ease of use and high throughput. 

The open architecture approach provides for flexible manufacturing test strategies, balancing cost and performance and allowing fast set-up and changeover for different packages and devices.

SPEA MEMS Test Cell 

- Complete turn key test solution, including handler, test system, sensor stimulus and software
- Optimized interface/docking connection, providing uptime, electrical integrity, reliability and ease of use
- Single-vendor solution, including integrated know-how, fast and easy set-up, complete service and support
- Proven, high parallel test/handling capability
- Open architecture for test system and pick & place handler provides flexibility and scalability. Both hardware and software are ready for easy modification/extension of the instrumentation with different modules, to meet new test requirements
- Modular design for easy, rapid accommodation of different applications
- Extremely compact footprint

- MEMS 3-axial accelerometers
- MEMS Gyroscopes
- MEMS Microphones
- Pressure sensors
- Magnetic sensors
- Customized application