You are here:   MEMS & Sensor Test > Products by Function > MEMS/Sensors Stimulus Units

MEMS/Sensors Stimulus Units

                          

 


Information
Request

 

MEMS/Sensors Stimulus Units     

 

SPEA handlers are complemented by the widest range of test units, so to combine in a single equipment all the elements of handling, contacting, and complete testing of MEMS and other devices. SPEA test units can include physical MEMS stimulus, contacting unit, and the required test resources.

 

Everything is designed and manufactured directly by SPEA for the integrated working, providing best technical performance, cost optimization, one-shot factory integration.

 

The cost of test is greatly reduced, thanks to the high throughput, lower investment, short application development time and rapid accomodation of different applications.

 

Devices

 

 

 

  

 

Stimulus Range

      


   

Inertial Sensors

Rate tables 

 

• Gyroscope test: constant velocity
  (trapezoidal profile with programmable
  velocity), sinusoidal and combined
  sinusoidal profiles with programmable
  amplitude and frequency

• accelerometer test: positioning mode

• 770-wire direct connection for multi-site
  testing

• temperature ranges: room temp, tri-temp

 

 

 

 

 


 

Pressure sensors 
Pressure Chamber

 

• operating range 0.03 to 0.13 MPa
  (0.3 to 1.3 bar)

• best pressure stability: leakage
  @1.2 MPa (12 bar) <0.1 mbar/s (10 Pa/s)

• up to 3 test stimuli with independent
  chambers, generators, indicators and
  contacting units

• temperature ranges: room temp, tri-temp

 

 

 

 


 

Humidity sensors
Humidity Chamber 

 

• humidity range: 0.5 to ambient rH

• humidity sensor accuracy: ±1° rH

• up to 3 test stimuli with independent
  chambers, generators, indicators and
  contacting units

• temperature ranges: room temp, tri-temp

 

 

 

 


 

Magnetic sensors

3-axis magnetic field generator 

 

• magnetic test unit for geomagnetic sensors

• in-socket magnetic stimulus + inertial +
  pressure for 6-DoF/9-DoF sensors

• ± 100μT magnetic field range, with 0,025μT
  accuracy

• temperature ranges: room temp

 

 

 

 


 

MEMS microphones

Acoustic chambers 

 

• max sound pressure level @200Hz: 140
  sBSPL

• max THD @94-140dBSPL
 (1kHz frequency): <1%

• adjustable spread between sites

• temperature ranges: room temp

 

 

 

 


 

Proximity sensors

Optical cameras 

  

• device capability to recognize presence,
  color and distance of a defined target is
  verified

• test is performed at different distances, with
  white-light or IR illuminators, on parallel
  stations

• temperature ranges: room temp

 

 

 

 


 

UV sensors

Solar simulators 

 

• high-accuracy UV sensor test, based on
  AAA-class solar simulator

• revolver unit to mask loading/unloading
  time

• embedded tester with direct socket
  board connection

• temperature ranges: room temp

 

 

 

 


 

Other devices
Test Jig Receiver 

 

• contacting unit accomodation

• tester connection

• controller for presser mechanism

• temperature ranges: room temp, tri-temp