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MEMS/Sensors Stimulus Units





MEMS/Sensors Stimulus Units     


SPEA handlers are complemented by the widest range of test units, so to combine in a single equipment all the elements of handling, contacting, and complete testing of MEMS and other devices. SPEA test units can include physical MEMS stimulus, contacting unit, and the required test resources.


Everything is designed and manufactured directly by SPEA for the integrated working, providing best technical performance, cost optimization, one-shot factory integration.


The cost of test is greatly reduced, thanks to the high throughput, lower investment, short application development time and rapid accomodation of different applications.








Stimulus Range



Inertial sensors
(low g / high g)

rate tables and shakers 


• low-g gyroscope test: constant velocity (trapezoidal profile with programmable velocity), sinusoidal and combined sinusoidal profiles with programmable amplitude and frequency

• low-g accelerometer test: positioning mode

• high g sensors test: up to 40g at 100Hz frequency

• 1,500-wire direct connection for multi-site testing







Barometric / TPMS pressure sensors 
pressure chambers


• operating ranges: 0.03 to 0.13 MPa (0.3 to 1.3 barA) or 0.03 to 1.3 Mpa (0.3 to 13 barA)

• best pressure stability: leakage @1.2 MPa (12 bar) <0.1 mbar/s (10 Pa/s)

• up to 3 test stimuli with independent chambers, generators, indicators and contacting units






Environmental sensors
universal chambers 



• combined humidity + pressure + temperature + gas stimulus

• relative humidity range: 30% to 70%

• up to 3 test stimuli with independent chambers, generators, indicators and contacting units






Magnetic sensors

3-axis magnetic field generator 


• magnetic test unit for geomagnetic sensors

• in-socket magnetic stimulus + inertial +
  pressure for 6-DoF/9-DoF sensors

• ± 100μT magnetic field range, with 0,025μT







Acoustic MEMS

acoustic chambers with microphones and speakers 


• stimulus for MEMS microphones and speakers

• max sound pressure level @80Hz-4kHz: 130 dBSPL

• max THD @94-130dBSPL (1kHz frequency): 0.1%






Proximity sensors

optical cameras 


• device capability to recognize presence,
  color and distance of a defined target is

• test is performed at different distances, with
  white-light or IR illuminators, on parallel






UV sensors

solar simulators 


• high-accuracy UV sensor test, based on
  AAA-class solar simulator

• revolver unit to mask loading/unloading

• embedded tester with direct socket
  board connection






Other devices
test Jig Receiver 


• contacting unit accomodation

• tester connection

• controller for presser mechanism