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MEMS/Sensors Stimulus Units





MEMS/Sensors Stimulus Units     


SPEA handlers are complemented by the widest range of test units, so to combine in a single equipment all the elements of handling, contacting, and complete testing of MEMS and other devices. SPEA test units can include physical MEMS stimulus, contacting unit, and the required test resources.


Everything is designed and manufactured directly by SPEA for the integrated working, providing best technical performance, cost optimization, one-shot factory integration.


The cost of test is greatly reduced, thanks to the high throughput, lower investment, short application development time and rapid accomodation of different applications.








Stimulus Range



Inertial Sensors

Rate tables 


• Gyroscope test: constant velocity
  (trapezoidal profile with programmable
  velocity), sinusoidal and combined
  sinusoidal profiles with programmable
  amplitude and frequency

• accelerometer test: positioning mode

• 770-wire direct connection for multi-site

• temperature ranges: room temp, tri-temp







Pressure sensors 
Pressure Chamber


• operating range 0.03 to 0.13 MPa
  (0.3 to 1.3 bar)

• best pressure stability: leakage
  @1.2 MPa (12 bar) <0.1 mbar/s (10 Pa/s)

• up to 3 test stimuli with independent
  chambers, generators, indicators and
  contacting units

• temperature ranges: room temp, tri-temp






Humidity sensors
Humidity Chamber 


• humidity range: 0.5 to ambient rH

• humidity sensor accuracy: ±1° rH

• up to 3 test stimuli with independent
  chambers, generators, indicators and
  contacting units

• temperature ranges: room temp, tri-temp






Magnetic sensors

3-axis magnetic field generator 


• magnetic test unit for geomagnetic sensors

• in-socket magnetic stimulus + inertial +
  pressure for 6-DoF/9-DoF sensors

• ± 100μT magnetic field range, with 0,025μT

• temperature ranges: room temp






MEMS microphones

Acoustic chambers 


• max sound pressure level @200Hz: 140

• max THD @94-140dBSPL
 (1kHz frequency): <1%

• adjustable spread between sites

• temperature ranges: room temp






Proximity sensors

Optical cameras 


• device capability to recognize presence,
  color and distance of a defined target is

• test is performed at different distances, with
  white-light or IR illuminators, on parallel

• temperature ranges: room temp






UV sensors

Solar simulators 


• high-accuracy UV sensor test, based on
  AAA-class solar simulator

• revolver unit to mask loading/unloading

• embedded tester with direct socket
  board connection

• temperature ranges: room temp






Other devices
Test Jig Receiver 


• contacting unit accomodation

• tester connection

• controller for presser mechanism

• temperature ranges: room temp, tri-temp